Green / Red / Blue Color Optical Thin Film Coating Machine With Electronic Control
Introduction:This equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film ,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It's the ideal equipment for coating high precision optical thin film.
Operation environment:
1.Power supply:three-phase ,220V/380V±5%,50HZ;
2.Temperature:10℃~40℃;
3.Cooling water:>100L/min,water pressure:0.2 ~ 0.3 Mpa, ,water temperature:15~25℃;
4.Pneumatic valve gas supply pressure:0.6～0.8MPa;
5.Equipment cover area:about 18㎡.
Optical Coating Machine Application:widely used for anti-reflective coating,reflective coating,filter coating,beam splitting film coating,cut-off film/bandpass film coating,high-reflective film coating,EMI coating,AF coating,waterproof coating ,color reflective film etc film system ,which can realize 0~99layers film,at the same time can meet car reflective glass,telescope,eyeglasses,optical lens,cold light cup etc products coating requirements.
No | Component Name | Parameter | |
1 | Vacuum Chamber | Vacuum chamber size | φ1550m×H1700mm |
Orbit&Rotation rotating stand | 3-30rpm | ||
Heater | 12KW | ||
2 | Vacuum Pumping System | Monoblock pump | E2M275 |
Roots pump | EH2400 | ||
Diffusion pump | 28 inches | ||
3 | Evaporation source and power supply | Electron gun | 8KW, |
Resistance evaporation | Single power supply 5KW,evaporation current 500A,time:10 min; | ||
Crucible | 2sets,one set 12 holes crucible(right),40CC/hole, crucible diameterφ260mm ; Annular crucible(left) | ||
4 | Workpiece Frame system | jig | Whole spherical,304 stainless steel thickness :3mm |
5 | Heating system | 1.Down heating 2.Heating power:12KW Temperature uniformity:300℃±5℃(heating within 30 min ) | |
6 | Ion source | Hall ion source | LZY-530 |
7 | Film thickness detector | single probe quartz crystal control system
| SQC-310 |
8 | Control system | PLC control system | Automatic / manual operation patterns |
Digital display compound vacuum gauge GFⅢ | 1high vacuum gauge, 2 low vacuum gauge, include vacuum gauge pipe and cable | ||
Electric control cabinet | vertical tank, main electrical components pass CE certification and ISO9001 certification . | ||
9 | Gas path system | 2 path mass flowmeter | With communication and module ,flow control range 8～200SCCM |
10 | water-cooling system | Cryogenic | TH-135-32A |
water-cooling | Temperature 20℃-25℃ | ||
Water pressure alarm linkage control system | |||
Acceptance Process: After machine making ,Seller will inform buyer to come to factory to check, at that time it can be testing for coating sample ,in user factory as the final checking. Seller must install ,testing on time and on the quality .After the whole machine be installed ,tested ,please buyer depend on the technology agreement and acceptance criteria.
What we will do for you ?
1.Installation: The supplier should send engineers to buyer's factory and help installation, commissioning and support of the production process. The round tickets, room and food should be to be paid by buyer. The buyer should assist and cooperate when needed.
2.Traning:during installation ,operator and maintenance man must full participate .supplier will provide traning in the locale including daily operation ,maintenance ,operation problem analyze and process of urgency.
3.After sale service: One year guarantee ,it will offer the best service in the guarantee or past guarantee .Due to improper use, or other damage to the equipment not itself no warranty, wearing parts is no in the repair. Guarantee begin to the machine finish testing .
