| 6kw-15kw | |
| Electron beam angle | 270° | |
| Anode voltage | 8KV-10KV | |
| Cathode heating power | AC 3V+3V 60V | |
| Start vacuum | 6.7×10-3Pa |
1,It imitates the Japan Joule electron gun and the quality is same as Joule electron gun
2, Energy well-distributed, beam spot is small, incident vertically, the electron gun is not digging, essentially flat overall evaporation, the spot diameter is ¢ 5- ¢ 25 and its adjustable, It can scan the square, circle, round face and the way can be set. It also can memory the 16 crucible scanning frequency, amplitude size, scan mode and spot positions, which reduced the reliance for the operator,at the same time,greatly improved the product repeatability.
3,It is easy maintain and inspect because of each unit is split.
