Optical Thin Film Deposition System With E-beam Gun
Optical coating machine parameter:
1.Equipment structure:cabinet vertical front opening door.(chamber size: φ800mm×H900mm).
2.Max temperature:300℃.
3.No-load ultimate vacuum:3×10－4Pa.
4.Restore vacuum:4×10－3Pa,less than 12mins.
5.E-beam gun:2pcs 270degree E-beam gun.Power:8KW adjustable.
6.Control instrument:American Inficon company XTC-3crystal control +six prob system.
7.Vacuum system control adopts IPC +OMRON PLC,can realize whole machine system continuous automatic coating.
8.Between diffusion pump and high vacuum valve equipped with water trap.
9.Main silicon seal adopt fluororubber.
Features:
1) Reliability:Has perfect fault feedback and operation interlock protection and each system self-diagnostic function.
2)Stability:coating parameter not reach set value,e-beam gun can't start.In coating process technological parameter error,evaporation automatic close.
3)Automation :can realize full automatic melt from venting to evaporation coating finished,one key control,support more than 20 holes crucibles,16 points spot premelting,control is flexible.
