Three targets magnetron sputtering coater (500W DC&500W RF)
INTRO
Three target magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable.
FEATURES
There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated.
The device is equipped with 500W DC power supply and 500W RF power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal films. The three targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, DC power supply and pulse power supply can be customized. Various types of power supply are available from 300W to 1000W in various specifications.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements.
The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 10E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency.
This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.
APPLICATION
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, this three-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
TECHNICAL PARAMETER
Sample stage | Size Dia.140mm Heating temperature Max 500℃ Temperature accuracy ±1℃ Rotational speed 1-20rpm adjustable |
Magnetron Sputtering head | Quantity 2"×3 (1",2" optional) Cooling mode Water cooling Water chiller Circulating water chiller with flow rate of 10L/min |
Vacuum chambe | Chamber size Dia.300mm×300mm Chamber material Stainless steel Watch window Dia.100mm Opening mode Top cover open |
Mass flowmeter | 2 channels; measuring range 100SCCM; 100SCCM (can be customized according to customer needs) |
Vacuum system | Model CY-GZK103-A Molecular pump CY-600 Backing pump Rotary vane pump Ultimate vacuum 1.0E-5Pa Pumping interface CF160 Exhaust interface KF40 Vacuum measurement Compound vacuum gauge Power supply AC;220V 50/60Hz Pumping rate Molecular pump: 600L/S rotary vane pump: 1.1L/S Comprehensive gas pumping performance: vacuum up to 1.0E-3Pa in 20 minutes |
Power configuration | Quantity DC power supply x2 RF power supply x1 Max output power DC 500 W, RF 500W |
Other parameters | Supply voltage AC220V,50Hz Total power 4KW Overall size 600mm×650mm×1280mm Total Weight About 300kg |
DETAIL PICTURE
