Due to its application prospects in solar-blind ultraviolet detection, MgZnO alloy semiconductor films with suitable band gaps have attracted more and more attention. A series of MgxZn1-xO thin films with different compositions were prepared on M plane sapphire wafers by using low-pressure metalorganic chemical vapor deposition (LP-MOCVD).
CRYSCORE provides M plane (10-10) sapphire wafers with excellent surface quality. The roughness on the epi-polished side is lower than 0.5 nm.
Specifications of M-Plane (10-10) Sapphire Wafers
Item | 2-inch M-plane(10-10) 430μm Sapphire Wafers | |
Crystal Materials | 99,999%, High Purity, Monocrystalline Al2O3 | |
Grade | Prime, Epi-Ready | |
Surface Orientation | M-plane(11-10) | |
Diameter | 50.8 mm +/- 0.1 mm | |
Thickness | 430 μm +/- 25 μm | |
Primary Flat Orientation | C-plane(0001) +/- 0.2° | |
Primary Flat Length | 16.0 mm +/- 1.0 mm | |
Single Side Polished (SSP) | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
Back Surface | Fine ground, Ra = 0.8 μm to 1.2 μm | |
Double Side Polished (DSP) | Front Surface | Epi-polished, Ra < 0.5 nm (by AFM) |
Back Surface | Epi-polished, Ra < 0.5 nm (by AFM) | |
TTV | < 10 μm | |
BOW | < 10 μm | |
WARP | < 10 μm | |
Cleaning / Packaging | Class 100 cleanroom cleaning and vacuum packaging, 25 pieces in one cassette packaging or single piece packaging. |
Note: Custom sapphire wafers with any orientation and any thickness can be provided.
Our sapphire wafer cost you less and help you to achieve more, contact us to get more information.
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