IR film Coating Machine Vacuum Coating System for Optical Coatings
1.Vacuum chamber sizeΦ1120×1300MM,which is made of high grade 304 stainless steel ,inner surface by polishing treatment, surface with cooling water jacket,postposition pumping system,vertical front opening door structure.
2.Substrate holder speed 3～30rpm, AC variable frequency speed regulation(Korea LG),up driven way.Workpiece plate axial and radial runout≦±2mm;ferrofluidic seal,whole substrate holder structure adopts 304 stainless steel.
3.Vacuum pumping system
4.Evaporation source:Electron gun 2pcs 270 degree,E-beam,
1set resistance evaporation,single power supply 5KW,evaporation current can work stable in500A.
5.Film thickness control instrument:American Inficon SQC-310 Quartz crystal single probe control system,which can used for coating multilayer film.
6.Vacuum chamber heated by electric heating tube,which can realize automatic control temperature.
7.Equipment base use merchant steel made,surface spray paint, open the door, beautiful decoration.
8.Inflation system:Equip 2 path"Japan Yamatake"mass flowmeter,Flow control range:8～200SCCM;
9.Cryogenic system.
10.One set hall ion source.
11.Strong system testing and protection function, such as: water shortage and under-voltage detection and protection,high voltage phase sequence detection and protection,temperature detection and protection,vacuum system detection and protection.
12. Control system adopts touch human-machine interface control.System with automatic, manual and maintenance three kinds of operation patterns.All operations and process parameters recorded in computer for analysis inspection,user can develop coating process.
Optical thin film coater general information:
Optical coating equipment can be plated layers more short pass, long wave pass, antireflection film, reflective film, filter membrane, beam splitter, a bandpass film, dielectric film, high anti-film, color reflective film various film system , can achieve 0-99 layer film coating film system, but also to meet the requirements as automotive reflective coating glass, binoculars, glasses, optical lens, cold cups and other products. Configure different evaporation sources, electron gun and ion source and a variety of film thickness meter can be plated Department of metals, oxides, compounds and other high melting membrane deposition, and super-hard coating on the glass surface.
Acceptance Process: After machine making ,Seller will inform buyer to come to factory to check, at that time it can be testing for coating sample ,in user factory as the final checking. Seller must install ,testing on time and on the quality .After the whole machine be installed ,tested ,please buyer depend on the technology agreement and acceptance criteria.
