ZZS 630 Fully Automatic Optical Thin Film Coating Machine
Breif introduction:this equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film ,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It's the ideal equipment for coating high precision optical thin film.
Optical coating machine specification:
Chamber size:Φ630mm X H750mm
Workpiece plate:Φ570mm,SR540
Crystal control:SQC310 single probe,six probes
E-beam gun:two E-beam guns
Vacuum system:Molecular pump + Bipolar rotary vane pump
Ultimate vacuum:9.0 X 10-5Pa
Restore vacuum:4x10-3Pa,less than 12 min.
Heating temperature:Max 350ºC.
Power supply:three phase,380V/50HZ
Water pressure:0.2~0.4Mpa
Gas pressure:0.6~0.8Mpa
Weight:2T
Application:
Chengdu Guotai Company:
Workshop:
Certification
Customer visit
Exhibition site:
Customer plant
