Optical Coating Machine For Coating Anti - Reflective (AR) Film
This equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. It's the ideal equipment for coating high precision optical thin film.
Main technical parameters:
1.Equipment structure:cabinet vertical front opening door.(chamber size: φ630mm×H750mm)
2.Max temperature:300℃.
3.No-load ultimate vacuum:3×10－4Pa.
4.Restore vacuum:4×10－3Pa,less than 12mins.
5.E-beam gun: 270degree E-beam gun. Power:8KW adjustable.
6.Control instrument:American Inficon company XTC-3crystal control +six prob system.
7.Vacuum system control adopts IPC +OMRON PLC,can realize whole machine system continuous automatic coating.
8.Between diffusion pump and high vacuum valve equipped with water trap.
9.Main silicon seal adopt fluororubber.
