Optical Lens Coating Machine For AF Coating
Vacuum chamber:
1.Inner chamber size:Ф660 mm(diameter)×750 mm(Height).Chamber adopts 304 stainless steel,inner surface adopts polishing treatment,outer wall(include upper high vacuum valve upper end and vacuum chamber)circulate cooling water,outside surface welding stainless steel pipe,which can bear 2-4KG water pressure.
2.Cabinet body lined with stainless steel antifouling plate(Wall antifouling plate thicknessδ=1mm,base antifouling plate thicknessδ=3.0mm,include bleeding point adopts adjustable louver+stainless steel wire 2sets,antifouling plate is dismountable,easy to clean.
3.Between diffusion pump and high vacuum valve equipped with water trap one set.Vacuum chamber outer wall equipped with water cooling.Inside of vacuum chamber equipped with 1pcs floodlight.
4.Vacuum chamber outer wall adopts multistage water cooling,stainless steel material.
System operation:
Manual/automatic mode
Japan Omron PLC control all pump valve action.
High vacuum valve,low vacuum valve,pre-valve,position signals feed into PLC control signals.
PLC program with the fault alarm function,such as air pressure,water flow,mechanical pump etc protection and alarm.
IPC on-line monitoring PLC all kinds of input and output signal.
Dome rotation:
1.Rotating speed 3~30rpm,AC variable frequency speed regulating ( Korea's LG),up driven way,workpiece plate axial direction,diameter runout≦±2mm, twirl bearing parts with water jacket.
2.Adopting magnetic liquid sealing device,water jacket all is stainless steel,bearing is Japanese NSK.
3.when coating can voluntarily switch workpiece rotation speed,and can according to the setted speed automatic switch.
Crystal control instrument:
American inficon SQC-310 quartz crystal film thickness instrument,and relative control system.:
a) Use XTC-3 control electron beam evaporation rate.
b) Use XTC-3 Electron beam evaporation source baffle.
c) Use XTC-3 Control material air inflation
d) Control electron gun crucible rotation
