ITO Glass in Touch Panel, ITO Thin Film Coating Equipment, Ag, SiO Layer Coating, ITO High Transmission Coater
Standard applications: PET, high quality glass substrate. Like eletronic display, ITO coated microscope slide, Transparent shielding glass, conducting glass, defrosting film, De-icing film coating,
Machine Built Time: 2012, China.
Application: AR film, ITO film, conductive coating etc.
Technical Configurations:
1) DC Sputtering Sources: Cu, Al, ITO
2) MF Sputtering Sources
3) Turbo Molecular pump + Backing Pump group
4) High-intensity magnetic field to improve ITO film quality, target utilization rate >30%
5) Cu, Al, Si targets utilization rate > 35%
6) Deposition Rate: 30nm m/min ~ 40nm m/min
7) Sputtering Uniformity Area: 350mm
VAKIA FOCUS ON DETAILS
VAKIA-MSC Standard Specifications
| Model | Size(mm) |
Substrate Jigs (Qty.) |
Sputtering Power(kVA) |
Sputtering Targets (Qty.) |
Sputtering Cathode |
MFC | Remark |
| MSC800 | Φ800xH800 | 1 | 2*50 DC | 4 | Cylinder | 3 | ITO coating |
| MSC1616 | Φ1600xH1600 | 6,8 | 2*36 DC | 2 | Rectangular | 2 | 2-door |
Coating Samples
Please contact us for more information, Vakia Vacuum Coating is honored to be your your business partner.
