High Quality Zirconium Tube Target with Thread, R60702, R60704, Zr2, Zr4
irconium (Zr) Sputtering Targets
1. Product name: High purity Zirconium Targets
2. Purity: Zr+Hf>99.95%, Hf<300ppm.
3. Confirmation: ISO9001:2008certified
4. Standard:GB/T OR ASTM
5.Trace Elements
Grade | Main Elements(ppm,max) | ||||||||
Hf | Nb | Mo | Cr | Al | Ti | Mn | Ni | ||
Zr+Hf>99.95% | 200 | 5 | 10 | 10 | 100 | 10 | 5 | 50 | |
Cu | Sn | Sb | W | Pb | Bi | Mg | P | ||
5 | 50 | 5 | 10 | 5 | 5 | 5 | 10 | ||
Si | N | C | H | O | S | Fe | |||
100 | 30 | 30 | 10 | 150 | 20 | 100 | |||
6.Following standards to be applied if no specific tolerance for billets is provided.
Dimension | Square | Tolerance | Measuring tools | Remarks |
L(mm) | L | >-3 | calliper or tape | L,W,T represents length, width and thickness of the square. |
W(mm) | W | >-3 | calliper or tape | |
T(mm) | T | >-1 | calliper |
7.Following standards are to be applied when no specific requirements on flatness, parallelism and perpendicularity for products are provided.
(1) Flatness Standard;
Shape | Round | Square | Round | Square | Square | Remarks |
Dimension(mm) | D≤300 | L≤500 | D>300 | 500< span=""> | X>1000 | |
Tolerance(mm) | 0.1 | 0.3 | 0.5 | Thickness>8mm | ||
Tolerance(mm) | 0.25 | 0.35 | 0.5 | Thickness≤8mm | ||
