Multi-layer Green Coating Optic Vacuum Coater Optical Thin Film Coating Machine
1.Equipment structure:cabinet vertical front opening door.(chamber size: φ1300mm×H1500mm)
2.Max temperature:300℃.
3.No-load ultimate vacuum:4×10－4Pa.
4.Restore vacuum:4×10－3Pa,less than 12mins.
5.E-beam gun:2pcs 270degree E-beam gun.Power:8KW adjustable.
6.Control instrument:American Inficon company XTC-3crystal control +six prob system.
7.Vacuum system control adopts IPC +OMRON PLC,can realize whole machine system continuous automatic coating.
8.Between diffusion pump and high vacuum valve equipped with water trap.
9.Main silicon seal adopt fluororubber.
Electron beam evaporation (two guns single power):
1. High voltage: -4 ~-10Kv(voltage fixed in -9KV)
2. Max current:0.9A(relative accelerating voltage-9kV)
3. Max accelerating power:8kW
4. Electron beam deflection angle:180°
5. Electron beam position adjust width:±25mm
6. Electron beam scanning width: ±25mm
7. Electron beam scanning frequency:X=50Hz, Y=500Hz
8. Input voltage three phase:AC380V±10% 50/60Hz
9. Input power:Max power13kVA
10. No-load power:400VA
11. Output stability:less than±1.5%
12. Ripple wave:less than±4%
13. Stability: ±1.5%
14. Filament voltage:8VAC 50/60Hz
15. Filament current:Max 60A
16. Scanning position :(X axis,Y axis)Max output current ±2.5ADC
17. Scanning mode:adjustable
18. Can save every crucible spot( under outage condition keep same for ten years)
Transformer all adopts water-proof design further increase high pressure stability.
