This production line adopts the nano-material thin-film technology, vacuum magnetron sputtering technology, the latest intelligent automation control bus lines technology, the new type planar magnetron cathode. Compared with the general coating production line, this line combines more high-tech which effectively overcome the previous shortcomings of many production lines and significantly improve the stability and cost-effective, making the equipment more rational and more humane. Coating chamber is modular structure, which can flexibly adjust cathode and pump position according to different process requirements; Flexible cathode baffle structure saves replacing target material and cleaning process cycle; The use of domestic high-quality brand components and parts not only reduces the manufacturing costs but also the use- costs, at the same time ,reduces equipment failure's recovery time and costs, decreases the customer's needs of the equipment costs and technical requirements.
Features and configuration parameters
1, The entire production line is horizontal conveyor structure, production mode is continuous-time production.
2, Vacuum chamber modular designing and processing improves the interchangeability of components.
3, Equipped with high quality cathode and power, to improve the stability and productivity of the cathode work.
4,Equipped with independently controlled process gas and adopts binary system 5 segments air supply,which improves the uniformity of process gas and increases the uniformity of film transverse.
5, Adopting advanced molecular pumping systems, to prevent the vacuum chamber oil pollution ,ensure efficient and reliable operation.
6,Adopting the pumping chamber and cathode chamber isolation structure, molecular pumps and cathode individually furnished, which has a best effect of gas barrier.
