Copper and Silver Electron gun Vacuum Coating / E-beam Evaporation / Ion Source
General Information
Universal type optical coating machine feature:
- The crystalline diaphragm thickness monitoring,Coating process is full automatic control ;
- Can be mounted automatically over institutions, increase the capacity and reduce the production cost;
- Optical thin film process formula can provided according to the customer’s requirements, (inclusion technology);
Product characteristic:
1. Accurate optic film deposition controller: crystal thickness monitor/optical monitor
2. Center-driving or planetary substrate dome is selectable
3. Uniformed and large area ion beam distribution Hall-ion source
4. E-beam gun, stable power output, small and uniform E-beam spot
5. Well uniformity of film thickness, well repeatability of deposition
Optics Coatings: Anti-Reflection coating ( AF film), optical filter, color separation filter, telescope, periscope, microscope and digital camera.
Tag Keywords
electron gun , copper and silver , vacuum coating , E-beam , ion source , E-beam evaporation
Parameters :
|
model |
OEC630 |
OEC900 |
OEC1100 |
OEC1200 |
OEC1350 |
OEC1600 |
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application |
Plating system for multilayer film, antireflection film, filters and beam splitting film, 7 colour film, cold light film, reflective film, etc. |
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Principal dimension |
Inside the chamber |
φ630×800 |
φ900×1100 |
φ1100×1300 |
φ1200×1450 |
φ1350×1500 |
φ1600×1500 |
|
Substrate umbrella stand |
φ570 |
φ820 |
Φ1000 |
φ1100 |
φ1250 |
φ1500 |
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Umbrella stand rotary speed |
0~30r/min,continuously adjustable |
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Major parameter |
Vacuumizing speed |
From one bar to 5.0×10-3Pa12 minutes(no-load) |
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Ultimate vacuum |
3.0×10-4Pa |
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Substrate temperature |
350°C(maximum) |
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Exhaust system |
Exhaust vacuum pumps |
KT400 oil diffusion pump system |
KT600 oil diffusion pump system |
KT800 oil diffusion pump system |
KT600 oil diffusion pump system |
KT800 oil diffusion pump system |
KT800 oil diffusion pump system |
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Cryogenic trap |
Selective assembly |
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Heating system |
Heating method |
Up heating mode,heating plate adjust the heating power regional ,PID control |
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Heating power |
6KW |
6KW |
12KW |
12KW |
24KW |
48KW |
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Crystalline diaphragm thickness gauge |
SQC-310(or XTC-3) |
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Vacuum gauge |
thermocouple+thermionic cathode (Domestic) |
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flowmeter |
Yamatake |
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Ion source |
Domestic ion source |
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Electronic gun |
Domestic electronic gun |
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Resistance type evaporation |
Three electrode double group, electrode with water |
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Coating Samples
